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• NEW POWER PLASMA

Matching Network

• Product Overview
• RPG
• RF Generator
• Matching Network

• 匹配网络产品

  
  
  阻抗匹配网络（Impedance Matching Network）是将射频发生器输出的射频电源的最大功率高效传送到工艺腔体的装置，随着工艺的不同和腔体环境的变化进行实时匹配，使其输出的阻抗与射频发生器的输出阻抗大小相等（50 Ohm）。

• Product Features

     Full digital matcher

    High power delivery efficiency

    Dual frequency matching operation

    Reflected power : Less than 1% for forward power

    Preset repeatability : ±1% highest compatibility for I/O

• Item		SEMI	DISPLAY	SOLAR
  CVD/PVD	PECVD
  	PEALD
  	LPCVD
  	PVD
  DRY ETCH	POLY
  	METAL
  	OXIDE/NITRIDE
  	PR STRIP
  Volume		~10kW	10kW~	~10kW
  Frequency		400kHZ, 13.56MHz, 2MHz, 60MHz	13.56MHz, 3.2MHz	13.56MHz